Wafer container with cushion sheets

Details Wafer container with cushion sheets Wafer container with cushion sheets

2007-07-03

2011-12-20

Reynolds, Steven A. (Department: 3788)

Special receptacle or package

Holder for a removable electrical component

For a semiconductor wafer

C206S509000

Reexamination Certificate

active

08079477

ABSTRACT:
An elastic wafer-retaining cushion sheet is disposed at a wafer retaining position on the top of a wafer tray. The wafer-retaining cushion sheet has a releasably suction-adhering surface that releasably adheres by suction to the wafer tray. Consequently, there is no likelihood of the semiconductor wafer being damaged during transport or the like. In addition, the wafer-retaining cushion sheet can be readily attached to and detached from the wafer tray for washing or replacement according to need.

REFERENCES:
patent: 3511990 (1970-05-01), Hauss
patent: 3719273 (1973-03-01), Abe
patent: 4778326 (1988-10-01), Althouse et al.
patent: 5863630 (1999-01-01), Maruta et al.
patent: 6286684 (2001-09-01), Brooks et al.
patent: 2002/0144927 (2002-10-01), Brooks et al.
patent: 2007/0068846 (2007-03-01), Hsiao
patent: 2009/0297303 (2009-12-01), Hyobu et al.
patent: 10-50815 (1998-02-01), None
patent: 11-105970 (1999-04-01), None
patent: 2003-168731 (2003-06-01), None
patent: 2005-191419 (2005-07-01), None
English language Abstract of JP 10-50815, Feb. 20, 1998.
English language Abstract of JP 11-105970, Apr. 20, 1999.
English language Abstract of JP 2003-168731, Jun. 13, 2003.
English language Abstract of JP 2005-191419, Jul. 14, 2005.
U.S. Appl. No. 12/281,491 to Kasama, which was filed Sep. 3, 2008.

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