Imaging semiconductor structures using solid state illumination

Details Imaging semiconductor structures using solid state illumination Imaging semiconductor structures using solid state illumination

2005-04-19

2011-12-13

Toatley, Gregory J (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

Reexamination Certificate

active

08077305

ABSTRACT:
The invention consists of a camera, light sources, lenses and software algorithms that are used to image and inspect semiconductor structures, including through infrared radiation. The use of various configurations of solid state lighting and software algorithms enhances the imaging and inspection.

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