Photocopying – Projection printing and copying cameras – Methods
Reexamination Certificate
2007-10-09
2011-12-27
Glick, Edward (Department: 2882)
Photocopying
Projection printing and copying cameras
Methods
C355S056000, C355S053000
Reexamination Certificate
active
08085386
ABSTRACT:
A method for determining an exposure condition for use in projecting an image of a pattern of an original on a substrate includes a setting step of setting an exposure condition, an image calculating step of calculating a dimension of an image to be projected on the substrate under the set exposure condition, an electrical characteristic calculating step of calculating an electrical characteristic of at least one of a portion for use as an interconnection and a portion for use as a transistor in a pattern to be formed on the substrate in accordance with a result calculated in the image calculating step, a determining step of determining whether the electrical characteristic calculated in the electrical characteristic calculating step satisfies a requirement, and an adjusting step of adjusting the set exposure condition when the electrical characteristic is determined not to satisfy the requirement in the determining step.
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Canon Kabushiki Kaisha
Canon USA Inc IP Division
Glick Edward
Persaud Deoram
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