Charged particle beam irradiating apparatus

Details Charged particle beam irradiating apparatus Charged particle beam irradiating apparatus

2009-03-26

2011-11-01

Maskell, Michael (Department: 2881)

Radiant energy

Irradiation of objects or material

C250S3960ML, C250S3960ML, C250S492300, C600S001000, C600S002000

Reexamination Certificate

active

08049187

ABSTRACT:
The present invention provides a charged particle beam irradiating apparatus capable of irradiating a charged particle beam using both a wobbler method and a scanning method. A charged particle beam irradiating apparatus includes: scanning electromagnets that scan a charged particle beam; a wobbler irradiation unit that irradiates the charged particle beam using a wobbler method; a scanning irradiation unit that irradiates the charged particle beam using a scanning method; and a control unit that controls the wobbler irradiation unit and the scanning irradiation unit. In the charged particle beam irradiating apparatus, the control unit operates one of the wobbler irradiation unit and the scanning irradiation unit, and controls the other irradiation unit to be in a withdrawn state so as not to hinder the irradiation of the charged particle beam.

REFERENCES:
patent: 2002/0030164 (2002-03-01), Akiyama et al.
patent: 2009/0008575 (2009-01-01), Okazaki et al.
patent: 11-28252 (1999-02-01), None
patent: 2006-34701 (2006-02-01), None

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