Stock material or miscellaneous articles – Structurally defined web or sheet – Including variation in thickness
Reexamination Certificate
2007-03-28
2011-11-15
Loney, Donald J (Department: 1783)
Stock material or miscellaneous articles
Structurally defined web or sheet
Including variation in thickness
C428S157000, C428S702000, C257S417000, C073S504140
Reexamination Certificate
active
08057882
ABSTRACT:
It is intended to provide a membrane structure element that can be easily manufactured, has an excellent insulating property and high quality; and a method for manufacturing the membrane structure element. The manufacturing method is for manufacturing a membrane structure element including a membrane formed of a silicon oxide film and a substrate which supports the membrane in a hollow state by supporting a part of a periphery of the membrane. The method includes: a film formation step of forming a heat-shrinkable silicon oxide film13on a surface of a silicon substrate2by plasma CVD method; a heat treatment step of performing a heat treatment to cause the thermal shrinkage of the silicon oxide film13formed on the substrate1; and a removal step of removing a part of the substrate2in such a manner that a membrane-corresponding part of the silicon oxide film13is supported as a membrane in a hollow state with respect to the substrate2to form a recessed part4.
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Notification of Reasons for Rejection dispatched Feb. 23, 2011 by the Japanese Patent Office in the corresponding Japanese Application No. 2007-057956 (2 pages) with an English language translation (2 pages).
Hirano Takayuki
Kannaka Masato
Kawakami Nobuyuki
(Kobe Steel, Ltd.)
A. Marquez, Esq. Juan Carlos
Loney Donald J
Stites & Harbison PLLC
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