Method and apparatus for angular-resolved spectroscopic...

Details Method and apparatus for angular-resolved spectroscopic... Method and apparatus for angular-resolved spectroscopic...

2010-08-20

2011-11-08

Lyons, Michael A (Department: 2877)

Optics: measuring and testing

By light interference

Spectroscopy

Reexamination Certificate

active

08054467

ABSTRACT:
An apparatus and method to determine a property of a substrate by measuring, in the pupil plane of a high numerical aperture lens, an angle-resolved spectrum as a result of radiation being reflected off the substrate. The property may be angle and wavelength dependent and may include the intensity of TM- and TE-polarized radiation and their relative phase difference.

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