Solid-state inertial sensor on chip

Details Solid-state inertial sensor on chip Solid-state inertial sensor on chip

2009-02-04

2011-12-27

Chapman, Jr., John (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

C073S514290, C073S510000

Reexamination Certificate

active

08082790

ABSTRACT:
Monolithic solid-state inertial sensor. The sensor detects rotation rate about three orthogonal axes and includes a micromachined monolithic piezoelectric crystalline structure including an equal number of vibratory drive and detection tines on each side of an axis of symmetry of the sensor, the tines being synchronized to have alternate actuation movements inward and outward.

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International Search Report of PCT/US09/33075; Mailed on Jul. 16, 2009.
Written Opinion of PCT/US09/33075; Mailed on Jul. 16, 2009.

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