Electrostatic deflection control circuit and method of...

Details Electrostatic deflection control circuit and method of... Electrostatic deflection control circuit and method of...

2008-12-03

2011-10-25

Maskell, Michael (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

C250S397000, C250S3960ML, C250S310000, C250S311000

Reexamination Certificate

active

08044369

ABSTRACT:
An electrostatic deflection circuit and method of an electronic beam measuring apparatus which can achieve the high precision of the electronic beam measuring and contribute to the simplification of the structure of the apparatus is provided. In an analog arithmetic circuit included in an analog operation part constituting an electrostatic deflection circuit, output voltages of multipliers are added and output by an adder. When the magnification is low, as the side of an ordinarily closed contact is closed driven by a relay driving circuit, the output of the adder is amplified by a high gain amplifier with a high amplification factor and applied to an electrostatic deflecting board. When the magnification is high, the side of an ordinarily open contact is closed and it is amplified by a low gain amplifier with a low amplification factor and applied to the electrostatic deflecting board in the same way.

REFERENCES:
patent: 3911321 (1975-10-01), Wardly
patent: 5546319 (1996-08-01), Satoh et al.
patent: 7462838 (2008-12-01), Sasaki
patent: 10-199460 (1998-07-01), None
patent: 2002-117796 (2002-04-01), None

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