Photocopying – Projection printing and copying cameras – Step and repeat
Patent
1997-07-17
1999-03-02
Rutledge, D.
Photocopying
Projection printing and copying cameras
Step and repeat
250548, 356400, G03D 2753
Patent
active
058778454
ABSTRACT:
A scanning exposure apparatus for scan-exposing the image of a mask pattern on a mask onto a substrate by synchronously moving the mask and the substrate with respect to an exposing radiation flux is provided. The scanning exposure apparatus includes a movable mask stage for holding the mask, a movable substrate stage for holding the substrate, a first detector outputting a first signal indicating the position of the substrate stage, and a second detector outputting a second signal indicating the position of the mask stage. The scanning exposure apparatus further includes a controller processing the first signal to derive a target position of the mask stage, the controller receiving the second signal to derive a deviation of the mask stage from the target position, the controller further deriving an error anticipation signal in accordance with deviations in mask stage movement measured in advance of scan-exposure, and a mask stage controller for moving the mask stage in accordance with the derived deviation of the mask stage from the target position and the error anticipation signal to maintain the position of the mask stage to the target position.
REFERENCES:
patent: 5477304 (1995-12-01), Nishi
patent: 5646413 (1997-07-01), Nishi
patent: 5737063 (1998-04-01), Miyachi
LandOfFree
Scanning exposure apparatus and method does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Scanning exposure apparatus and method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Scanning exposure apparatus and method will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-427618