Data processing: generic control systems or specific application – Specific application – apparatus or process – Article handling
Reexamination Certificate
2008-10-09
2011-12-27
Prakasam, Ramya (Department: 3651)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Article handling
C700S218000
Reexamination Certificate
active
08086348
ABSTRACT:
A method is provided for transferring a substrate from a first substrate holder, e.g., a pre-alignment unit, to a second substrate holder, e.g., a substrate table in a lithographic apparatus, by means of a transfer unit on the basis of transfer data available thereto. First, the substrate is provided on the first substrate holder. Subsequently, a position error of the substrate is measured, and positioning adjustment data are calculated based on the position error as measured. Then, the second substrate holder is moved relative to a reference position thereof in accordance with the positioning adjustment data. Finally, the substrate is transferred by means of the transfer unit from the first substrate holder to the second substrate holder in accordance with the transfer data, and placed on the second substrate holder as moved.
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Alberti Jozef Augustinus Maria
Compen Rene Theodorus Petrus
Groensmit Frans Erik
Van Nunen Gerardus Petrus Matthijs
ASML Netherlands B.V.
Prakasam Ramya
Sterne Kessler Goldstein & Fox P.L.L.C.
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