Interferometric analysis of under-resolved features

Details Interferometric analysis of under-resolved features Interferometric analysis of under-resolved features

2008-10-09

2011-12-06

Lyons, Michael A (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S521000

Reexamination Certificate

active

08072611

ABSTRACT:
In certain aspects, disclosed methods include directing test light reflected from an object to form an image of the object on a detector, where the object includes a diffractive structure. The test light at the detector includes both specularly and non-specularly reflected light from the diffractive structure, and the diffractive structure is under-resolved in the image. The method further includes directing reference light to interfere with the test light at the detector where the reference and test light being derived from a common source, varying an optical path length difference between the test and reference light, acquiring an interference signal from the detector while varying the optical path length difference, and determining information about the diffractive structure based on the interference signal and on predetermined information derived from a mathematical model of light reflection from a model diffractive structure.

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