Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate
2007-04-20
2011-12-27
Zervigon, Rudy (Department: 1716)
Coating apparatus
Gas or vapor deposition
With treating means
C122S005000, C122S00600B, C502S034000, C156S345100
Reexamination Certificate
active
08082878
ABSTRACT:
Thermal evaporation apparatus for depositing of a material on a substrate, comprising material storage means; heating means to generate a vapor of the material in the material storage means; vapor outlet means comprising a vapor receiving pipe having vapor outlet passages, and emission reducing means arranged such that an external surface of the vapor outlet means directed to said substrate exhibits low emission, and wherein the apparatus further comprises pipe heating means in the interior of said vapor outlet means, wherein at least the surfaces of the material storage means, heating means, and emission reducing means and pipe heating means arranged to come into contact with the material vapor are of a corrosion-resistant material. Further a thermal evaporation apparatus for depositing a material on a substrate comprising a vapor outlet means arranged to receive in its interior the vapor of the material heated in a material storage means and having vapor outlet passages, wherein said vapor outlet means basically consist of a corrosion-resistant material and are gastight to such an extent that sufficient dynamic pressure of said material vapor is achievable for homogenous deposition of said material on said substrate. Also the use of the apparatus, and a method of depositing a material onto a substrate by thermal evaporation.
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PCT Written Opinion issued for PCT Application No. PCT/EP2007/053912 filed Apr. 20, 2007 in the name of Shell Erneuerbare Energien GMBH.
International Search Report (PCT/EP2007/053912).
Probst Volker
Stetter Walter
Saint-Gobain Glass France
Steinfl & Bruno LLP
Zervigon Rudy
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