Support structures for electromechanical systems and methods...

Details Support structures for electromechanical systems and methods... Support structures for electromechanical systems and methods...

2009-05-05

2011-12-20

Choi, William (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S224100

Reexamination Certificate

active

08081370

ABSTRACT:
A method of making an interferometric modulator element includes forming at least two posts, such as posts formed from spin-on glass, on a substrate. In alternate embodiments, the posts may be formed after certain layers of the modulator elements have been deposited on the substrate. An interferometric modulator element includes at least two spin-on glass support posts located on the substrate. In alternate embodiments, the support posts may be located over certain layers of the modulator element, rather than on the substrate. A method of making an interferometric modulator element includes forming a rigid cap over a support post. An interferometric modulator element includes support posts having rigid cap members.

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