Data processing: generic control systems or specific application – Specific application – apparatus or process – Electrical power generation or distribution system
Reexamination Certificate
2007-07-09
2011-11-08
Decady, Albert (Department: 2121)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Electrical power generation or distribution system
C714S002000, C714S004300, C714S010000, C714S025000, C714S047100, C714S048000, C714S050000, C714S051000, C714S759000, C700S021000, C700S108000, C700S121000, C700S131000, C700S174000, C700S202000, C700S209000
Reexamination Certificate
active
08055391
ABSTRACT:
A server device constituting a group management system includes one or more manufacturing apparatuses for performing a preset process on a target substrate, and the server device includes a measurement information storage unit for storing therein one or more measurement information; an instruction receiving unit for receiving an output instruction of the measurement information, which contains information specifying a predetermined start point and valid time information; a measurement information acquisition unit for acquiring, from the measurement information storage unit, measurement information ranging from the predetermined start point to a time point of the valid time; an output information composing unit for composing output information by using the acquired measurement information; and an output unit for outputting the output information composed by the output information composing unit.
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Koyama Noriaki
Obata Minoru
Takahashi Masashi
De'cady Albert
Pearne & Gordon LLP
Stevens Thomas
Tokyo Electron Limited
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