System and method for using first-principles simulation to...

Details System and method for using first-principles simulation to... System and method for using first-principles simulation to...

2003-09-30

2011-11-01

Shah, Kamini S. (Department: 2128)

Data processing: structural design, modeling, simulation, and em

Simulating electronic device or electrical system

C703S007000, C700S121000, C438S005000

Reexamination Certificate

active

08050900

ABSTRACT:
A method, system, and computer readable medium for facilitating a process performed by a semiconductor processing tool. The method includes inputting data relating to a process performed by the semiconductor processing tool, and inputting a first principles physical model relating to the semiconductor processing tool. First principles simulation is performed using the input data and the physical model to provide a virtual sensor measurement relating to the process performed by the semiconductor processing tool, and the virtual sensor measurement is used to facilitate the process performed by the semiconductor processing tool.

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