Apparatus and method for positioning a workpiece

Details Apparatus and method for positioning a workpiece Apparatus and method for positioning a workpiece

2008-03-28

2011-10-04

Fulton, Christopher (Department: 2841)

Geometrical instruments

Straight-line light ray type

Alignment device

C250S559300, C356S141300, C356S139030

Reexamination Certificate

active

08028427

ABSTRACT:
A stage for aligning a workpiece relative to analyzing apparatus. The stage has a platform and means for maintaining a workpiece on the platform. The platform is operable to tilt relative to the analyzing apparatus and thereby rotate the workpiece relative to the analyzing apparatus.

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