Electricity: measuring and testing – Impedance – admittance or other quantities representative of... – Calibration
Reexamination Certificate
2005-07-29
2011-10-25
Valone, Thomas (Department: 2858)
Electricity: measuring and testing
Impedance, admittance or other quantities representative of...
Calibration
C324S608000, C324S635000
Reexamination Certificate
active
08044668
ABSTRACT:
A method and system for calibrating a plurality of measurement systems. The method includes obtaining a first plurality of calibration standards. The first plurality of calibration standards is associated with a plurality of predetermined values. Additionally, the method includes measuring the first plurality of calibration standards by a plurality of measurement systems to obtain a first plurality of measured values, processing information associated with the first plurality of measured values, and selecting a first measurement system from the plurality of measurement systems based on at least information associated with the first plurality of measured values. Moreover, the method includes calibrating the first measurement system with the first plurality of calibration standards, obtaining a second plurality of calibration standards, and measuring the second plurality of calibration standards by the first measurement system to obtain a second plurality of measured values.
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Chen Yu
Wang Eugene
Kilpatrick Townsend and Stockton LLP
Semiconductor Manufacturing International (Shanghai) Corporation
Valone Thomas
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