System and method for a MEMS device

Details System and method for a MEMS device System and method for a MEMS device

2007-08-20

2011-12-20

Sugarman, Scott J (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S291000

Reexamination Certificate

active

08081369

ABSTRACT:
Light in the visible spectrum is modulated using an array of modulation elements, and control circuitry connected to the array for controlling each of the modulation elements independently, each of the modulation elements having a surface which is caused to exhibit a predetermined impedance characteristic to particular frequencies of light. The amplitude of light delivered by each of the modulation elements is controlled independently by pulse code modulation. Each modulation element has a deformation portion having a flexible membrane held under tensile stress, and the control circuitry controls the deformation of the deformation portion. An optical portion may be formed on the flexible membrane which helps provides an optical response to movement of the deformation portion.

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