Coating apparatus – With indicating – testing – inspecting – or measuring means
Reexamination Certificate
2008-08-25
2010-11-16
Estrada, Michelle (Department: 2823)
Coating apparatus
With indicating, testing, inspecting, or measuring means
C257SE21521, C257S021000
Reexamination Certificate
active
07832353
ABSTRACT:
A semiconductor manufacturing apparatus includes a processing unit for processing at least one wafer; a loading/unloading unit for loading/unloading at least wafer; an input/output chamber for taking in a processed wafer from the processing unit and taking out the processed wafer to the loading/unloading unit, and taking in a unprocessed wafer from the loading/unloading unit and taking out the unprocessed wafer to the reaction unit; and a wafer inspection device for inspecting the processed wafer through a light transmittable top portion of the input/output chamber, through which light is transmittable, while the processed wafer is temporarily placed in the input/output chamber.
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Nishino Teruhide
Takizawa Masahiro
ASM Japan K.K.
Estrada Michelle
Knobbe Martens Olson & Bear LLP
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