Semiconductor-type pressure sensor with sensing based upon press

Details Semiconductor-type pressure sensor with sensing based upon press Semiconductor-type pressure sensor with sensing based upon press

1996-12-23

1999-03-02

Felber, Joseph L.

Measuring and testing

Fluid pressure gauge

Diaphragm

73726, 73720, 73 3512, 338 42, G01L 904, G01L 906

Patent

active

058774254

ABSTRACT:
A combustion pressure sensor suitable for a highly precise combustion control system of an automobile engine and a sensing system using the sensor. The combustion pressure sensor includes a SOI substrate having a three-layered structure of a first silicon plate, a thermal oxide film, and a second silicon plate, wherein a combustion pressure is sensed on the basis of a pressure or a force applied to the first silicon plate.

REFERENCES:
patent: 5406852 (1995-04-01), Hiraka et al.
patent: 5528214 (1996-06-01), Koga et al.
patent: 5683594 (1997-11-01), Hocker et al.

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