Optical: systems and elements – Optical modulator – Having particular chemical composition or structure
Reexamination Certificate
2007-05-14
2010-06-15
Choi, William C (Department: 2873)
Optical: systems and elements
Optical modulator
Having particular chemical composition or structure
C359S315000, C438S029000
Reexamination Certificate
active
07738160
ABSTRACT:
Lithography aperture lenses, illumination systems, and methods are disclosed. In a preferred embodiment, a lens includes a substantially transparent material and an electro-optical material disposed proximate the substantially transparent material, wherein the lens is a lens for an illuminator of a lithography system.
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Schneider Jens
Temchenko Vlad
Choi William C
Infineon - Technologies AG
Slater & Matsil L.L.P.
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