Method for manufacturing protective layer

Details Method for manufacturing protective layer Method for manufacturing protective layer

2006-09-11

2010-11-30

Chen, Bret (Department: 1715)

Coating processes

Coating by vapor, gas, or smoke

Mixture of vapors or gases utilized

C427S255310

Reexamination Certificate

active

07842342

ABSTRACT:
A method for manufacturing a protective layer such that when the protective layer is formed in a film-forming chamber, the partial pressure of water in the film-forming chamber is controlled by the exhaust velocity of the water in the film-forming chamber. During formation of the protective layer the total pressure in the film-forming chamber is kept constant. In addition, the partial pressure of the water in the film-forming chamber is controlled while introducing a gas into the film-forming chamber, thereby controlling the ratio of the partial pressure of hydrogen to the partial pressure of oxygen in the film-forming chamber.

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Chinese Office Action issued in Chinese Patent Application No. CN 2006800015015, mailed Jan. 16, 2009.

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