Extreme ultra violet light source apparatus

Radiant energy – Radiant energy generation and sources – With radiation modifying member

Reexamination Certificate

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Details

C250S493100, C250S494100, C372S038070, C372S055000, C378S119000

Reexamination Certificate

active

07732794

ABSTRACT:
In an extreme ultra violet light source apparatus having a comparatively large output power for exposing, a solid target is supplied fast and continuously while heat dissipation for irradiation of a driver laser light is performed successfully. The extreme ultra violet light source apparatus includes: a chamber in which extreme ultra violet light is generated; a target material supplying unit which coats a wire with target material, a wire supplying unit which supplies the wire coated with the target material to a predetermined position within the chamber, a driver laser which applies a laser beam onto the wire coated with the target material to generate plasma; and a collector mirror which collects the extreme ultra violet light radiated from the plasma and outputting the extreme ultra violet light.

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patent: 7365351 (2008-04-01), Bowering et al.
patent: 7476886 (2009-01-01), Bykanov et al.
patent: 2008/0048133 (2008-02-01), Bykanov et al.
patent: 2008/0197298 (2008-08-01), Abe et al.
patent: 2008/0197299 (2008-08-01), Hoshino et al.
patent: 2009/0314967 (2009-12-01), Moriya et al.
patent: 11-250842 (1999-09-01), None
patent: 2006-244837 (2006-09-01), None

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