Micro-electromechanical system (MEMS) based current and...

Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With coupling means

Reexamination Certificate

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C324S11700H

Reexamination Certificate

active

07741832

ABSTRACT:
A micro-electro-mechanical system (MEMS) current sensor for sensing a magnetic field produced by an electrical current flowing in a conductor includes a first fixed element and a moving element. The moving element is spaced away from the first fixed element and is movable relative to the fixed element responsive to a magnetic field produced by an electrical current flowing in a conductor for providing a mechanical indication of a strength of the magnetic field. The sensor also includes a tunneling current generator for generating a tunneling current between the first fixed element and the moving element and a tunneling current monitor for monitoring a change in the tunneling current responsive to the mechanical indication to provide an indication of a value of the electrical current in the conductor.

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