Semiconductor device manufacturing: process – Making passive device – Resistor
Reexamination Certificate
2008-04-11
2010-12-28
Wilson, Allan R (Department: 2815)
Semiconductor device manufacturing: process
Making passive device
Resistor
C438S392000, C257SE21004
Reexamination Certificate
active
07858484
ABSTRACT:
A semiconductor device includes a substrate, an insulating film disposed on the substrate, a resistor groove disposed in the insulating film, and a resistor disposed in the resistor groove. The resistor is separated from all side surfaces of the resistor groove by a predetermined distance.
REFERENCES:
patent: 4897360 (1990-01-01), Guckel et al.
patent: 6362066 (2002-03-01), Ryum et al.
patent: 6806136 (2004-10-01), Hsu
patent: 7365397 (2008-04-01), Nomura
patent: 7485540 (2009-02-01), Chinthakindi et al.
patent: 7538397 (2009-05-01), Kotani
patent: 7622345 (2009-11-01), Ting et al.
patent: 2003/0181049 (2003-09-01), Huang et al.
patent: 2005/0088491 (2005-04-01), Truninger et al.
patent: 2005/0181556 (2005-08-01), Hsu
patent: 2005/0248397 (2005-11-01), Aota
patent: 2007/0096183 (2007-05-01), Ogawa et al.
patent: 2008/0188053 (2008-08-01), Ting et al.
patent: 57-211253 (1982-12-01), None
patent: 63-087762 (1988-04-01), None
patent: 06-005786 (1994-01-01), None
patent: 08-335701 (1996-12-01), None
patent: 2000-156420 (2000-06-01), None
patent: 2000-195966 (2000-07-01), None
patent: 2001-257272 (2001-09-01), None
patent: 2004-134802 (2004-04-01), None
patent: 2005-175262 (2005-06-01), None
patent: 2008-103501 (2008-05-01), None
patent: 2008-235798 (2008-10-01), None
S. Yamaguchi et al.; High Performance Dual Metal Gate CMOS with High Mobility and Low Threshold Voltage Applicable to Bulk CMOS Technology; 2006 Symposium on VLSI Technology Digest of Technical Papers.
Office Action issued on Mar. 17, 2009, in the related Japanese application JP 2007-107973.
SNR Denton US LLP
Sony Corporation
Wilson Allan R
LandOfFree
Semiconductor device and method for producing the same does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Semiconductor device and method for producing the same, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor device and method for producing the same will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4235102