Method for obtaining an abrasive coating

Details Method for obtaining an abrasive coating Method for obtaining an abrasive coating

1981-04-20

1982-10-05

Newsome, John H.

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

51209DL, B05D 502, E05D 1510

Patent

active

043528368

ABSTRACT:
A method of preparing an abrasive silicon oxide coating on a substrate which includes glow discharging silane and N.sub.2 O in the presence of a substrate whereby a first silicon oxide layer having a refractive index of between about 1.0 and 1.2 as measured by ellipsometry is deposited. A second silicon oxide layer having a refractive index of between about 1.30 and 1.48 as measured by ellipsometry is glow discharge deposited onto the first layer.

REFERENCES:
patent: 4104832 (1978-08-01), Keizer
patent: 4260647 (1981-04-01), Wang et al.
patent: 4282268 (1981-08-01), Priestley et al.
Joyce et al., "Silicon Oxide and Nitride Films Deposited by an R.F. Glow-Discharge, " Thin Solid Films, vol. 1, pp. 481-494 (1967/1968).

Affiliated with

Also associated with

Rating

Method for obtaining an abrasive coating does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for obtaining an abrasive coating, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for obtaining an abrasive coating will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-423375