MEMS shock sensors

Details MEMS shock sensors MEMS shock sensors

2007-02-22

2010-10-12

Caputo, Lisa M (Department: 2855)

Measuring and testing

Testing by impact or shock

Specimen impactor detail

Reexamination Certificate

active

07810373

ABSTRACT:
A shock sensor comprises a substrate and at least one flexure coupled to the substrate and configured to deflect upon an application of force to the shock sensor sufficient to deflect the flexure. Deflection of the at least one flexure produces a detectable change in an electrical property of the shock sensor. Examples of detectable changes in an electrical property of the shock sensor include an open circuit condition, a closed circuit condition, and a variation in voltage of a piezo-electric detector. In some embodiments, the change in the electrical property of the shock sensor may be remotely read by interrogation of a radio frequency identification transponder positioned on the substrate using a remote radio frequency identification transceiver. The disclosure also relates to a shock sensing system and method of shock detection.

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