Body having a smooth diamond layer, device and method therefor

Details Body having a smooth diamond layer, device and method therefor Body having a smooth diamond layer, device and method therefor

2004-03-22

2010-10-19

Kunemund, Robert M (Department: 1714)

Single-crystal, oriented-crystal, and epitaxy growth processes;

Forming from vapor or gaseous state

With decomposition of a precursor

C117S084000, C117S088000, C117S102000, C117S105000, C117S928000, C117S929000, C076SDIG012

Reexamination Certificate

active

07815735

ABSTRACT:
The invention refers to a method and apparatus for CVD coating and to a coated body. To improve the mechanical properties of the structure and surface of the body and to make the method and apparatus as simple and cost-effective as possible, it is suggested in the method, in which a layer is deposited on a substrate in a carbon-containing gas atmosphere:that the process parameters be varied during the coating period in such a way that during the coating period a first operating mode and a second operating mode are repeatedly alternated,wherein in the first operating mode a higher carbon over-saturation of the gas atmosphere occurs near the substrate,and in the second operating mode a lower carbon over-saturation of the gas atmosphere occurs near the substrate.In this way, a body can be produced with a substrate and at least one layer deposited on the surface of the substrate, wherein the layer consists of nano-crystalline diamond.

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Ali et al, “Promoting secondary nucleartion using methane modulations during diamond chemical vapor deposition to prodcue smoother, harder and better quality films”, J. Material Res. vol. 18, No. 2, (Feb. 2003), p. 296-304.
Chen et al, “Growth of highly transparent nanocrystalline diamond films and a spectroscopic study of the growth”, Journal of applied physics, vol. 89, No. 1, Jan. 2001, p. 753-759.

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