Thin substrate pitch measurement equipment

Details Thin substrate pitch measurement equipment Thin substrate pitch measurement equipment

2008-09-30

2010-02-16

Sohn, Seung C (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

With circuit for evaluating a web, strand, strip, or sheet

C250S22300B, C340S686500

Reexamination Certificate

active

07663129

ABSTRACT:
The present invention provides an equipment for measuring the vertical distance or pitch between a plurality of thin substrates inside a container body, including an optical component to transmit a light beam to a thin substrate in the container body and receive light beam reflected from the thin substrate, a scanning device to drive the optical component to move along vertical direction of the thin substrates for measuring the vertical distance or pitch between the plurality of thin substrates in the container body, and a rotation base to carry and rotate the container body to a plurality of angles for the plurality of thin substrates inside the container body to be measured from different angular positions.

REFERENCES:
patent: 5225691 (1993-07-01), Powers et al.
patent: 5308993 (1994-05-01), Holman et al.
patent: 5418382 (1995-05-01), Blackwood et al.
patent: 5466945 (1995-11-01), Brickell et al.
patent: 6097492 (2000-08-01), Kondo et al.
patent: 6188323 (2001-02-01), Rosenquist et al.
patent: 6303939 (2001-10-01), Chung et al.
patent: 6514879 (2003-02-01), Arghavani et al.
patent: 6795202 (2004-09-01), Emoto et al.

Affiliated with

Also associated with

Rating

Thin substrate pitch measurement equipment does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Thin substrate pitch measurement equipment, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Thin substrate pitch measurement equipment will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4214373