Apparatus and method for adjusting the position of a pull wire o

Details Apparatus and method for adjusting the position of a pull wire o Apparatus and method for adjusting the position of a pull wire o

1995-06-20

1996-12-10

Breneman, R. Bruce

Single-crystal, oriented-crystal, and epitaxy growth processes;

Apparatus

For crystallization from liquid or supercritical state

117200, 117208, C30B 3500

Patent

active

055826423

ABSTRACT:
A method of laterally adjusting the position of a pull wire of a crystal pulling machine to dampen pendular motion of the pull wire during production of a monocrystal comprises: placing a close-fitting guide around the pull wire; rotating the pulling chamber about the axis Z.sub.1 to rotate both the pull wire and the monocrystal supported by the pull wire; sensing the lateral position of a portion of the pull wire; adjusting the lateral position of the guide in response to the sensed position of the pull wire to dampen pendular motion of the pull wire during production of a monocrystal.

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Servometer Flexible Shaft Couplings brochure, Servometer Corp., Bulletin No. RCP 1093, pp. 1-8.
Micro Slides for Precision Linear Motion Catalog, Micro Slides Corp., Catalog MS-6R, (Jul. 23, 1984).

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