Coating processes – Electrical product produced
Reexamination Certificate
2006-07-31
2010-06-29
Culbert, Roberts (Department: 1792)
Coating processes
Electrical product produced
C427S097300
Reexamination Certificate
active
07744947
ABSTRACT:
A method of fabricating a semiconductor device by filling carbon nanotubes in a recess is disclosed. The method of fabricating the semiconductor device comprises patterning a mold on a substrate, coating carbon nanotubes on an entire surface of the recess and the mold formed by the patterning, filling the carbon nanotubes coated on the an entire surface of the mold in the recess, and removing the mold.
REFERENCES:
patent: 6129901 (2000-10-01), Moskovits et al.
patent: 2002/0193040 (2002-12-01), Zhou
Choi Yang Kyu
Lee Byung Chul
Lee Jeong Oen
Yoon Jun-Bo
Culbert Roberts
Korea Advanced Institute of Science and Technology
The Belles Group P.C.
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