Micro-electro-mechanical-system (MEMS) resonator and...

Details Micro-electro-mechanical-system (MEMS) resonator and... Micro-electro-mechanical-system (MEMS) resonator and...

2006-11-17

2010-02-02

Takaoka, Dean O (Department: 2817)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C333S188000

Reexamination Certificate

active

07656252

ABSTRACT:
A micro-electro-mechanical-system resonator, includes: a substrate; a fixed electrode formed on the substrate; and a movable electrode, arranged facing the fixed electrode and driven by an electrostatic attracting force or an electrostatic repulsion force that acts on a gap between the fixed electrode and the movable electrode. An internal surface of a support beam of the movable electrode facing the fixed electrode has an inclined surface.

REFERENCES:
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patent: A 7-66280 (1995-03-01), None
patent: A-2004-266991 (2004-09-01), None
patent: A-2004-314251 (2004-11-01), None
patent: WO 2005078752 (2005-08-01), None

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