Radiant energy – Ionic separation or analysis – With sample supply means
Patent
1988-01-07
1989-01-24
Anderson, Bruce C.
Radiant energy
Ionic separation or analysis
With sample supply means
250309, 250396, H01J 4904
Patent
active
048002739
ABSTRACT:
Secondary ion mass spectrometer system having an ion collection lens including three conical lens sections, aligned along an axis, deflection plates for dynamically deflecting an ion beam along this axis, wherein the combination of lens sections and deflection plates focus the ions at an entrance aperture of an ion energy spectrometer formed by two 90.degree. sectors of spherical arcuate plates, an ion deceleration lens, a quadrupole mass spectrometer, and an ion detector. In combination, the three conical lens sections accelerate ions from a specimen surface, decelerate these ions into an ion energy spectrometer for energy window matching to the quadrupole mass spectrometer, and focus the ions on the entrance aperture of the ion energy spectrometer.
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Anderson Bruce C.
Berman Jack I.
Sjoquist Paul L.
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