Coating processes – Coating by vapor – gas – or smoke
Reexamination Certificate
2008-07-10
2010-02-09
Meeks, Timothy (Department: 1792)
Coating processes
Coating by vapor, gas, or smoke
C427S255230, C427S255700
Reexamination Certificate
active
07658970
ABSTRACT:
Embodiments described herein relate to depositing a cobalt-containing layer by a cyclical deposition process while forming interconnects on a substrate. In one embodiment, a method for forming an interconnect structure is provided which includes depositing a tungsten-containing barrier layer over an exposed contact metal surface within an aperture formed in an insulating material disposed on a substrate, forming a cobalt-containing layer on the tungsten-containing barrier layer using a cyclical deposition process by sequentially exposing the substrate to a cobalt precursor gas and a silicon reducing gas, wherein the cobalt precursor gas contains a cobalt precursor having a cyclopentadienyl ligand, and depositing a copper material on the cobalt-containing layer.
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Chang Mei
Chen Ling
Gambetta Kelly M
Meeks Timothy
Patterson & Sheridan LLP
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