System and process for heating semiconductor wafers by...

Details System and process for heating semiconductor wafers by... System and process for heating semiconductor wafers by...

2007-10-31

2010-12-07

Fuqua, Shawntina (Department: 3742)

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

C219S405000, C219S411000, C392S416000, C392S418000, C118S724000, C118S725000, C118S050100, C432S009000, C432S092000

Reexamination Certificate

active

07847218

ABSTRACT:
An apparatus for heat treating semiconductor wafers is disclosed. The apparatus includes a heating device which contains an assembly linear lamps for emitting light energy onto a wafer. The linear lamps can be placed in various configurations. In accordance with the present invention, tuning devices which are used to adjust the overall irradiance distribution of the light energy sources are included in the heating device. The tuning devices can be, for instance, are lamps or lasers.

REFERENCES:
patent: 2318533 (1943-05-01), Selvig
patent: 3879257 (1975-04-01), Gentile et al.
patent: 3903342 (1975-09-01), Roberts, Jr.
patent: 4166001 (1979-08-01), Dunning et al.
patent: 4207467 (1980-06-01), Doyle
patent: 4225382 (1980-09-01), Kearney et al.
patent: 4234356 (1980-11-01), Auston et al.
patent: 4316074 (1982-02-01), Daly
patent: 4318752 (1982-03-01), Tien
patent: 4344818 (1982-08-01), Nuttall et al.
patent: 4375993 (1983-03-01), Mori et al.
patent: 4414038 (1983-11-01), Dausinger et al.
patent: 4468279 (1984-08-01), Itzkan
patent: 4487635 (1984-12-01), Kugimiya et al.
patent: 4547651 (1985-10-01), Maruyama
patent: 4550684 (1985-11-01), Mahawili
patent: 4571486 (1986-02-01), Arai et al.
patent: 4615765 (1986-10-01), Levinson et al.
patent: 4672740 (1987-06-01), Shirai et al.
patent: 4719122 (1988-01-01), Yamazaki
patent: 4761538 (1988-08-01), Chiba et al.
patent: 4780590 (1988-10-01), Griner et al.
patent: 4959245 (1990-09-01), Dobson et al.
patent: 4975561 (1990-12-01), Robinson et al.
patent: 5155336 (1992-10-01), Gronet et al.
patent: 5179677 (1993-01-01), Anderson et al.
patent: 5222112 (1993-06-01), Terasawa et al.
patent: 5253324 (1993-10-01), Wortman
patent: 5255286 (1993-10-01), Moslehi et al.
patent: 5268989 (1993-12-01), Moslehi et al.
patent: 5304357 (1994-04-01), Sato et al.
patent: 5317492 (1994-05-01), Gronet et al.
patent: 5317656 (1994-05-01), Moslehi et al.
patent: 5326171 (1994-07-01), Thompson et al.
patent: 5336641 (1994-08-01), Fair et al.
patent: 5345534 (1994-09-01), Najm et al.
patent: 5367606 (1994-11-01), Moslehi et al.
patent: 5399523 (1995-03-01), Kakoschke
patent: 5418885 (1995-05-01), Hauser et al.
patent: 5436172 (1995-07-01), Moslehi
patent: 5444815 (1995-08-01), Lee et al.
patent: 5446825 (1995-08-01), Moslehi et al.
patent: 5487127 (1996-01-01), Gronet et al.
patent: 5493987 (1996-02-01), McDiarmid et al.
patent: 5523262 (1996-06-01), Fair et al.
patent: 5536918 (1996-07-01), Ohkase et al.
patent: 5587019 (1996-12-01), Fujie
patent: 5612251 (1997-03-01), Lee
patent: 5635409 (1997-06-01), Moslehi
patent: 5656132 (1997-08-01), Farrington, Jr. et al.
patent: 5668376 (1997-09-01), Weckström et al.
patent: 5683173 (1997-11-01), Gronet et al.
patent: 5689614 (1997-11-01), Gronet et al.
patent: 5695607 (1997-12-01), Oriaran et al.
patent: 5743643 (1998-04-01), Gronet et al.
patent: 5762713 (1998-06-01), Paranjpe
patent: 5767486 (1998-06-01), Gronet et al.
patent: 5790751 (1998-08-01), Gronet et al.
patent: 5814365 (1998-09-01), Mahawili
patent: 5820942 (1998-10-01), Singh et al.
patent: 5840125 (1998-11-01), Gronet et al.
patent: 5851629 (1998-12-01), Oriaran et al.
patent: 5861609 (1999-01-01), Kaltenbrunner et al.
patent: 5874711 (1999-02-01), Champetier et al.
patent: 5882479 (1999-03-01), Oriaran et al.
patent: 5886320 (1999-03-01), Gallo et al.
patent: 5908307 (1999-06-01), Talwar et al.
patent: 5911890 (1999-06-01), Dulaney et al.
patent: 5913974 (1999-06-01), Habuka
patent: 5930456 (1999-07-01), Vosen
patent: 5932068 (1999-08-01), Farrington, Jr. et al.
patent: 5936698 (1999-08-01), Koyama
patent: 5937142 (1999-08-01), Moslehi et al.
patent: 5954982 (1999-09-01), Sogard
patent: 5958185 (1999-09-01), Vinson et al.
patent: 5960158 (1999-09-01), Gat et al.
patent: 5970214 (1999-10-01), Gat
patent: 5970382 (1999-10-01), Shah
patent: 5980637 (1999-11-01), Singh et al.
patent: 5997175 (1999-12-01), Champetier et al.
patent: 6001175 (1999-12-01), Maruyama et al.
patent: 6016383 (2000-01-01), Gronet et al.
patent: 6017418 (2000-01-01), Oriaran et al.
patent: 6019850 (2000-02-01), Frey
patent: 6027244 (2000-02-01), Champetier et al.
patent: 6033523 (2000-03-01), Dwiggins et al.
patent: 6033761 (2000-03-01), Dwiggins et al.
patent: 6034357 (2000-03-01), Guardado
patent: 6051104 (2000-04-01), Oriaran et al.
patent: 6056434 (2000-05-01), Champetier
patent: 6068731 (2000-05-01), Dwiggins et al.
patent: 6075922 (2000-06-01), Tay et al.
patent: 6103063 (2000-08-01), Oriaran et al.
patent: 6113740 (2000-09-01), Oriaran et al.
patent: 6122439 (2000-09-01), Gronet et al.
patent: 6143131 (2000-11-01), Dwiggins et al.
patent: 6153053 (2000-11-01), Harper et al.
patent: 6160242 (2000-12-01), Guardado
patent: 6174651 (2001-01-01), Thakur
patent: 6200023 (2001-03-01), Tay et al.
patent: 6204484 (2001-03-01), Tay et al.
patent: 6210484 (2001-04-01), Hathaway
patent: 6222990 (2001-04-01), Guardado et al.
patent: 6258614 (2001-07-01), Kaneko
patent: 6281141 (2001-08-01), Das et al.
patent: 6293696 (2001-09-01), Guardado
patent: 6310328 (2001-10-01), Gat
patent: 6319761 (2001-11-01), Zhang et al.
patent: 6329105 (2001-12-01), Fujita et al.
patent: 6359263 (2002-03-01), Tay et al.
patent: 6403923 (2002-06-01), Tay et al.
patent: 6514876 (2003-02-01), Thakur et al.
patent: 6531681 (2003-03-01), Markle et al.
patent: 6559424 (2003-05-01), O'Carroll et al.
patent: 6570656 (2003-05-01), Owens, Jr. et al.
patent: 6610967 (2003-08-01), Gat
patent: 6614005 (2003-09-01), Walk et al.
patent: 6638876 (2003-10-01), Levy et al.
patent: 6650480 (2003-11-01), Tanaka
patent: 6657154 (2003-12-01), Tanabe et al.
patent: 6693257 (2004-02-01), Tanaka
patent: 6717158 (2004-04-01), Gat et al.
patent: 6727474 (2004-04-01), Gat
patent: 6747245 (2004-06-01), Talwar et al.
patent: 6770146 (2004-08-01), Koren et al.
patent: 6771895 (2004-08-01), Gat et al.
patent: 6797312 (2004-09-01), Kong et al.
patent: 6808758 (2004-10-01), Thakur
patent: 6835914 (2004-12-01), Timans
patent: 6875691 (2005-04-01), Li et al.
patent: 6884719 (2005-04-01), Chang et al.
patent: 6902622 (2005-06-01), Johnsgard et al.
patent: 6970644 (2005-11-01), Koren et al.
patent: 2002/0017618 (2002-02-01), Gat et al.
patent: 2002/0027716 (2002-03-01), Tanaka
patent: 2002/0104619 (2002-08-01), Koren et al.
patent: 2002/0137311 (2002-09-01), Timans
patent: 2003/0031793 (2003-02-01), Chang et al.
patent: 2003/0124820 (2003-07-01), Johnsgard et al.
patent: 2003/0196993 (2003-10-01), Jennings
patent: 2003/0196995 (2003-10-01), Jennings
patent: 2003/0196996 (2003-10-01), Jennings et al.
patent: 2003/0209326 (2003-11-01), Lee et al.
patent: 2003/0235983 (2003-12-01), Li et al.
patent: 2003/0236642 (2003-12-01), Timans
patent: 2004/0018008 (2004-01-01), Koren et al.
patent: 2004/0025787 (2004-02-01), Selbrede et al.
patent: 2004/0035847 (2004-02-01), Gat
patent: 2004/0058557 (2004-03-01), Eisele et al.
patent: 2004/0063290 (2004-04-01), Jennings et al.
patent: 2004/0084427 (2004-05-01), Talwar et al.
patent: 2004/0084437 (2004-05-01), Timans
patent: 2005/0006916 (2005-01-01), Mantz
patent: 2005/0098552 (2005-05-01), Timans
patent: 4306398 (1994-09-01), None
patent: 0476307 (1992-03-01), None
patent: 0505928 (1992-09-01), None
patent: 0576791 (1994-01-01), None
patent: 0618329 (1994-10-01), None
patent: 0675225 (1995-10-01), None
patent: 0811709 (1997-12-01), None
patent: 0811709 (1997-12-01), None
patent: 0821084 (1998-01-01), None
patent: 0811709 (1998-08-01), None
patent: 2130009 (1984-05-01), None
patent: WO 9513424 (1995-05-01), None
patent: WO 9852214 (1998-11-01), None
patent: WO 9958733 (1999-11-01), None
patent: WO 0145501 (2001-06-01), None
patent: WO 0145501 (2001-06-01), None
PCT Search Report, Mar. 26, 2003.
Article—Absorption of Infrared Radiation in Silicon, I.W. Boyd, T.D. Binnie, J.I.B. Wilson, and M. J. Colles, J. Appl. Phys. 55 (8), Apr. 15, 1984, pp. 3061-3063.
Abstract of Japanese Patent No. JP5259082, Oct. 8, 1993.
Article—Temperature measurement in rapid thermal processing, Paul J. Timans, Solid State Technology, Apr. 1997, 6 pages.
Article—Reduced Thermal Processing for ULSI, C. Hill, S. Jon

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