Zinc diffusion process

Details Zinc diffusion process Zinc diffusion process

1990-08-17

1992-05-26

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437167, 437164, 437127, 437905, 148DIG99, H01L 21223

Patent

active

051167816

ABSTRACT:
A process is disclosed of diffusing a zinc dopant into a III-V compound substrate. To avoid degrading the substrate surface the zinc dopant source is provided by coating an organic composition comprised of a zinc organic compound chosen from the group consisting of zinc alcoholates, .beta.-diketonate chelates and carboxylate salts. The composition inludes at least one organic film-forming moiety containing from 5 to 30 carbon atoms.

REFERENCES:
patent: 3658584 (1972-04-01), Schmidt
patent: 3856588 (1974-12-01), Hashimoto
patent: 4880770 (1989-11-01), Mir et al.

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