Piezoelectric actuator for tunable electronic components

Details Piezoelectric actuator for tunable electronic components Piezoelectric actuator for tunable electronic components

2003-04-22

2010-02-02

Budd, Mark (Department: 2837)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S330000, C310S332000

Reexamination Certificate

active

07656071

ABSTRACT:
An actuating assembly for tuning a circuit and a process for forming a carrier substrate containing a membrane, a conductive layer, and piezoelectric actuators are disclosed. The actuating assembly comprises a membrane overlying a circuit to be tuned, a conductive element connected with the membrane, and a piezoelectric arrangement. Changes in shape of the piezoelectric arrangement allow a deflection of the membrane and a corresponding controllable upward or downward movement of the conductive element. In the process, a membrane and a piezoelectric structure are formed on a substrate.

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