Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate
2007-02-09
2010-02-02
Lauchman, L. G (Department: 2877)
Optics: measuring and testing
By alignment in lateral direction
With registration indicia
C356S400000, C422S022000, C422S030000
Reexamination Certificate
active
07656528
ABSTRACT:
A method and system to measure misalignment error between two overlying or interlaced periodic structures are proposed. The overlying or interlaced periodic structures are illuminated by incident radiation, and the diffracted radiation of the incident radiation by the overlying or interlaced periodic structures are detected to provide an output signal. The misalignment between the overlying or interlaced periodic structures may then be determined from the output signal.
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“Kinetics of the Diffractio
Abdulhalim Ibrahim
Adel Mike
Faeyrman Michael
Friedmann Michael
Davis , Wright, Tremaine, LLP
KLA-Tencor Corporation
Lauchman L. G
LandOfFree
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