Micromirror device with a single address electrode

Details Micromirror device with a single address electrode Micromirror device with a single address electrode

2008-02-25

2010-11-23

Spector, David N (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S291000, C345S085000

Reexamination Certificate

active

07839561

ABSTRACT:
A micromirror device comprises a plurality of mirrors arranged on a substrate, an elastic hinge for supporting each mirror to be deflectable in a plurality of directions, an address electrode composed of first and second regions that are arranged across the deflection axis of each mirror, and a driving circuit for controlling the mirror to deflect in the directions of the first and the second regions.

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