Electrical audio signal processing systems and devices – Electro-acoustic audio transducer – Microphone capsule only
Reexamination Certificate
2006-01-19
2010-11-02
Kuntz, Curtis (Department: 2614)
Electrical audio signal processing systems and devices
Electro-acoustic audio transducer
Microphone capsule only
C073S655000, C250S23700G, C356S498000
Reexamination Certificate
active
07826629
ABSTRACT:
A microphone having an optical component for converting the sound-induced motion of the diaphragm into an electronic signal using a diffraction grating. The microphone with inter-digitated fingers is fabricated on a silicon substrate using a combination of surface and bulk micromachining techniques. A 1 mm×2 mm microphone diaphragm, made of polysilicon, has stiffeners and hinge supports to ensure that it responds like a rigid body on flexible hinges. The diaphragm is designed to respond to pressure gradients, giving it a first order directional response to incident sound. This mechanical structure is integrated with a compact optoelectronic readout system that displays results based on optical interferometry.
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Degertekin F. Levent
Miles Ronald N.
Elbin Jesse A
Hoffberg Steven M.
Kuntz Curtis
Ostrolenk Faber LLP
State University New York
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