Micro-cantilever

Details Micro-cantilever Micro-cantilever

2008-01-22

2010-12-07

Benson, Walter (Department: 2837)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S364000, C310S365000, C310S367000, C367S160000

Reexamination Certificate

active

07847469

ABSTRACT:
A micro-cantilever of a simple structure and capable of obtaining a larger displacement at a low voltage including a plate-like piezoelectric substrate having electrode films as an upper electrode and a lower electrode formed on both surfaces thereof, a plate-like resilient member in close contact with the piezoelectric substrate on the side of the lower electrode and a support for supporting a driving member in a cantilever manner, in which a thin-walled portion is formed to the vicinity of a base portion of the driving member supported by the support.

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patent: 2005-332802 (2005-12-01), None

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