System and method providing control of reticle stocking and...

Details System and method providing control of reticle stocking and... System and method providing control of reticle stocking and...

2004-03-26

2010-02-09

Crawford, Gene (Department: 3651)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Article handling

C700S099000, C700S101000, C414S935000

Reexamination Certificate

active

07660646

ABSTRACT:
A reticle stocking and sorting system. The reticle management system comprises first reticle storage, second reticle storage, third reticle storage, and a host system. The first reticle storage stores a first reticle currently in use. The second reticle storage stores a second reticle not currently in use. The third reticle storage stores a third unused reticle temporarily before it is disposed of. The host system is adapted to rearrange the first, second, and third reticles among the first, second, and third reticle storages, based on demand data pertaining to a product requiring least one article during fabrication.

REFERENCES:
patent: 6535778 (2003-03-01), Okabe et al.
patent: 6579052 (2003-06-01), Bonora et al.
patent: 6748292 (2004-06-01), Mountz
patent: 2001/0047222 (2001-11-01), Wiesler et al.
patent: 2003/0204280 (2003-10-01), Kobayashi
patent: 2006/0195209 (2006-08-01), Tseng et al.

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