Light attenuating filter for correcting field dependent...

Details Light attenuating filter for correcting field dependent... Light attenuating filter for correcting field dependent...

2007-05-23

2010-11-30

Nguyen, Hung Henry (Department: 2882)

Photocopying

Projection printing and copying cameras

Distortion introducing or rectifying

C355S067000, C355S071000

Reexamination Certificate

active

07843549

ABSTRACT:
Ellipticity in an illumination beam may be corrected by measuring an ellipticity of the illumination beam and substantially eliminating the ellipticity using a light attenuating filter at a defocus position of the illumination beam, wherein the light attenuating filter has a two-dimensional pattern that compensates for ellipticity variations in the illumination beam. The light attenuating filter may stand alone, or the filter may be combined with a uniformity correction system, such that it corrects both uniformity and ellipticity. In one embodiment, the light attenuating filter is printed with an assembly of microscopic dots according to the two-dimensional pattern.

REFERENCES:
patent: 6281967 (2001-08-01), Kudo
patent: 6404482 (2002-06-01), Shiraishi
patent: 6771350 (2004-08-01), Nishinaga
patent: 7173688 (2007-02-01), Wiener et al.
patent: 2006/0146309 (2006-07-01), Hult
patent: 2007/0103665 (2007-05-01), Zimmerman et al.
patent: 2007/0109518 (2007-05-01), Wiener et al.

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