Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2006-01-06
2010-02-02
Nguyen, Hung Henry (Department: 2851)
Photocopying
Projection printing and copying cameras
Illumination systems or details
Reexamination Certificate
active
07656505
ABSTRACT:
An exposure apparatus and printed wafer such that a design is printed within a peripheral portion of the wafer. The peripheral portion of the wafer is between an outer boundary of an active portion of the wafer and an outer boundary of the wafer. The exposure apparatus comprises a lens, a reticle that includes a pattern, and a reticle blind. The reticle blind blocks a first portion of light that is passed through the exposure apparatus. A transparent portion of the reticle transmits a remaining portion of the light. The lens focuses the remaining portion of the light onto the wafer such that an image of a portion of the pattern is printed as the design within the peripheral portion of the wafer. The printed design is a function of where the reticle blind is positioned relative to the pattern.
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Froebel Robert T.
Pealer, III Grant N.
Sonntag Paul D.
Canale Anthony J.
International Business Machines - Corporation
Liu Chia-how Michael
Nguyen Hung Henry
Schmeiser Olsen & Watts
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