Micro-electromechanical capacitive strain sensor

Details Micro-electromechanical capacitive strain sensor Micro-electromechanical capacitive strain sensor

2009-09-02

2010-11-23

Caputo, Lisa M (Department: 2855)

Measuring and testing

Specimen stress or strain, or testing by stress or strain...

Specified electrical sensor or system

C073S777000

Reexamination Certificate

active

07836776

ABSTRACT:
A micro-electromechanical capacitive strain sensor. The micro-electromechanical capacitive strain sensor comprises a first bent beam, a second bent beam, and a straight center beam. The first bent beam, second bent beam, and straight center beam are aligned in the X-axis with the straight center beam located between the first and second bent beams. The first bent beam, second bent beam, and straight center beam are disposed between two anchors. The two anchors are aligned in the Y-axis. The first bent beam is bent away from the center beam and the second bent beam is bent towards the center beam to provide a set of differential capacitors with respect to the center beam, wherein the center beam serves as a common reference with respect to the first and second bent beams.

REFERENCES:
patent: 6218762 (2001-04-01), Hill et al.
Y. B. Gianchandani and K. Najafi, “Bent-Beam Strain Sensors,” Journal of Microelectromechanical Systems, vol. 5, No. 1, Mar. 1996, pp. 52-58.
J. Guo, H. Kuo, D.J. Young, W.H. Ko, “Buckled Beam Linear Output Capacitive Strain Sensor,” Solid-State Sensor. Actuator and Microsystems Workshop, Hilton Head Island USA (Jun. 6-10, 2004), pp. 344-347.
L. L. Chu, L. Que, and Y. B. Gianchandani, “Measurements of Material Properties Using Differential Capacitive Strain Sensors,” Journal of Microelectromechanical Systems, vol. 11, No. 5, Oct. 2002, pp. 489-498.

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