Method for manufacturing magnetic recording medium

Details Method for manufacturing magnetic recording medium Method for manufacturing magnetic recording medium

2005-12-09

2010-06-22

Vinh, Lan (Department: 1792)

Semiconductor device manufacturing: process

Chemical etching

Vapor phase etching

C438S714000, C438S723000, C216S067000, C216S072000

Reexamination Certificate

active

07741229

ABSTRACT:
A method for manufacturing a magnetic recording medium is provided, which can manufacture a magnetic recording medium that includes a recording layer having a concavo-convex pattern and has a sufficiently flat surface. The method includes the steps of: forming an object to be processed including a recording layer having a predetermined concavo-convex pattern formed over a substrate and a first mask layer (temporary underlying material) formed at least on recording elements (convex portions) of the recording layer; depositing a filling material on the object to be processed to fill concave portions; removing a part of the filling material by dry etching to expose at least side faces of the first mask layer; and removing the first mask layer by an etching method in which an etching rate of the first mask layer is higher than that of the filling material to flatten a surface.

REFERENCES:
patent: 4935278 (1990-06-01), Krounbi et al.
patent: 6074959 (2000-06-01), Wang et al.
patent: 6583957 (2003-06-01), Takeshita et al.
patent: 6586044 (2003-07-01), Takeshita et al.
patent: 6635185 (2003-10-01), Demmin et al.
patent: 6670278 (2003-12-01), Li et al.
patent: 2005/0048198 (2005-03-01), Suwa et al.
patent: 2005/0086795 (2005-04-01), Suwa et al.
patent: 2005/0175791 (2005-08-01), Hattori et al.
patent: 2005/0186356 (2005-08-01), Hattori et al.
patent: 2005/0199581 (2005-09-01), Suwa et al.
patent: 2005/0287397 (2005-12-01), Soeno et al.
patent: 2006/0021966 (2006-02-01), Hattori et al.
patent: A 1-279421 (1989-11-01), None
patent: A 5-22291 (1993-03-01), None
patent: A 2000-195042 (2000-07-01), None
patent: A 2001-110050 (2001-04-01), None
patent: WO 01/26101 (2001-04-01), None

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