Radiation imagery chemistry: process – composition – or product th – Plural exposure steps
Reexamination Certificate
2004-12-29
2010-11-23
Rosasco, Stephen (Department: 1795)
Radiation imagery chemistry: process, composition, or product th
Plural exposure steps
C430S005000, C424S489000
Reexamination Certificate
active
07838208
ABSTRACT:
Magnetic nanoparticle masks for lithographic applications of a substrate and methods for producing such masks via defining regions of localized magnetic field maxima and minima on a substrate are provided. Also provided are methods for producing multi-component patterns on a substrate with the magnetic nanoparticle masks.
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Friedman Gennady
Yellen Benjamin B.
Drexel University
Drinker Biddle & Reath LLP
Rosasco Stephen
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