Method for transporting substrates

Details Method for transporting substrates Method for transporting substrates

2009-06-17

2010-12-07

Lowe, Michael S (Department: 3652)

Material or article handling

Process

Of moving material between zones having different pressures...

C414S217000, C414S744500, C414S754000, C414S936000, C414S939000

Reexamination Certificate

active

07845897

ABSTRACT:
Substrates are transported to accurate positions, while mounted on one hand of a transport robot. When substrates are to be transported from transporting chamber into processing chamber, a first mounting portion of a hand is located immediately above first processing position provided in processing chamber; and the substrate placed on first mounting portion is lifted up. Then, a second mounting portion is located immediately above second processing position by finely moving the hand. Next, the substrate on second mounting portion is lifted up. When the hand is pulled out from between the substrates and first and second processing positions and the substrates are lowered, the substrates are accurately arranged on first and second processing positions. When substrates are mounted on the hand in an order reverse to the above, the substrates in processing chamber can be accurately mounted on first and second mounting portions and be carried out.

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International Search Report for International Application No. PCT/JP2008/053141 dated Mar. 5, 2008.

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