Ion pump having emission containment

Details Ion pump having emission containment Ion pump having emission containment

2006-09-14

2010-12-14

Freay, Charles G (Department: 3746)

Pumps

Electrical or getter type

C250S437000

Reexamination Certificate

active

07850432

ABSTRACT:
An ion pump having emissions containment. The ion pump includes an anode constructed from a plurality of tubes and a cathode constructed from plates positioned on opposite sides of the anode and positioned apart from the anode. The anode and cathode are positioned within a gastight housing having a gas inlet. A blocking shield assembly is provided within the line of sight between the gas inlet and the cathode. The blocking shield assembly is also provided within the line of sight between the gas inlet and any surface within the ion pump that itself is within the line of sight of the cathode. The blocking shield assembly prevents photons and neutral particles from being emitted from the ion pump.

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“Vacuum Solutions for Electron Microscopy Applications”, Brochure by Varian, Inc.,(Jul. 2005), pp. 1-12.

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