Sensor and manufacturing method thereof

Electrical resistors – Strain gauge type

Reexamination Certificate

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Details

C338S047000, C073S721000, C073S708000

Reexamination Certificate

active

07852191

ABSTRACT:
A plate member101having flexible portions; plate members102to104having openings corresponding to the flexible portions of the plate member101; a plate member201having flexible portions; and plate members202to204having openings corresponding to the flexible portions of the plate member201are formed by etching. The plate members101to104and201to204are bonded by diffusion bonding process to make first and second flanges100and200. Interconnecting shafts are formed by cutting. The first and second flanges100and200and the interconnecting shafts are bonded by diffusion bonding process to make a strain generation unit5. Strain gauges are attached to the lower face of the strain generation unit5. A stain gauge type sensor1is thus made.

REFERENCES:
patent: 4672354 (1987-06-01), Kurtz et al.
patent: 5499535 (1996-03-01), Amano et al.
patent: 5831163 (1998-11-01), Okada
patent: 6700473 (2004-03-01), Kurtz et al.
patent: 6966228 (2005-11-01), Binet et al.
patent: 1 621 859 (2006-02-01), None
patent: 2005-31062 (2005-02-01), None
Patent Abstracts of Japan for Japanese Publication No. 2005-031062, Publication date Feb. 3, 2005 (2 pages).
European Search Report for European Application No. 07121086.8-1236, mailed on May 3, 2010 (4 pages).

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